MODULE AND METHOD FOR PRODUCING EXTREME ULTRAVIOLET RADIATION

摘要

A module (1) for producing extreme ultraviolet radiation includes a supply configured to supply droplets of an ignition material to a predetermined target ignition position and a laser (6) arranged to be focused on the predetermined target ignition position and to produce a plasma by hitting such a droplet (4) which is located at the predetermined target ignition position in order to change the droplet into an extreme ultraviolet producing plasma. Also, the module includes a collector mirror (12) having a mirror surface (14) constructed and arranged to reflect the radiation in order to focus the radiation on a focal point (FP). A fluid supply (2) is constructed and arranged to form a gas flow (GF) flowing away from the mirror surface in a direction transverse with respect to the mirror surface in order to mitigate particle debris produced by the plasma.