THERMAL SPRAY COATING METHOD, METHOD OF MANUFACTURING A ELECTROSTATIC CHUCK USING THE THERMAL SPRAY COATING METHOD AND ELECTROSTATIC CHUCK

摘要

A thermal spray coating method, an electrostatic chuck and a method for manufacturing the electrostatic chuck using the same are provided to prevent offering a melting dielectric material and a non-melting dielectric material into a coating plane. A thermal spray coating method comprises the following steps. Objects having a coating plane are arranged. A melted dielectric material spreads on the coating plane. The coating plane faces a first direction, a second direction having the vertical direction with the first and a direction, between the first direction and the second direction. The melted dielectric material is emitted to the coating plane of the objects vertically.