| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric film which is superior in orientation and can exhibit an excellent piezoelectric characteristic, and to provide a piezoelectric element. <P>SOLUTION: The method of manufacturing a piezoelectric film includes: a process to supply such a film formation material on a substrate that is composed of particles having three magnetic susceptibilities (Mx, My, Mz) corresponding to three magnetization axes (X<SB>1</SB>, X<SB>2</SB>, X<SB>3</SB>) crossing orthogonally to each other, a dispersion medium to disperse the particles; a process to impress the substrate supplied with the film formation material a variable magnetic field wherein at least either intensity or direction thereof is changed in time; and a process to remove the dispersion medium while the magnetic field is being applied. The piezoelectric film is obtained from the remaining film material from which the dispersion medium is removed. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
