| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a stamping tool, wherein structuring in the nanometer range is enabled in a simple and cost-effective manner. SOLUTION: In the method for manufacturing a stamping tool with a stamping surface, the process for forming the stamping surface includes a process wherein a covering layer 6 having hollow chambers 4 is formed at least on a part of the surface of a support 5 formed from a valve metal, or at least on a part of a surface layer 3 formed from a valve metal and applied to the surface of the support 5, wherein the hollow chambers have openings having an average diameter (D) of 10 to 500 nm, and also, the structural width (S) thereof is in the range from 30 to 600 nm. The process of forming the covering layer includes: a stage wherein at least a part of the surface of the support or at least a part of the surface layer is subjected to anodic oxidation; a stage wherein etching is performed after that; and a stage wherein anodic oxidation is further performed. COPYRIGHT: (C)2009,JPO&INPIT
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