发明名称 APPARATUS FOR CONTINUOUS COATING
摘要 Apparatus for continuous coating has a chamber wall which forms a processing chamber, thermal insulation which forms a processing area within the chamber, a transportation device for substrates located in the processing area with a substrate transportation direction of the substrates lying in the lengthwise extension of the apparatus for continuous coating, and heating equipment which heats the substrates, is designed to minimize unwanted coating, in particular of parts of the apparatus, in order to minimize the expense of maintaining and servicing the apparatus A condensation element is positioned in the processing chamber, which extends into the processing area and binds the arising vapor through condensation.
申请公布号 US2009050057(A1) 申请公布日期 2009.02.26
申请号 US20080197638 申请日期 2008.08.25
申请人 VON ARDENNE ANLAGENTECHNIK GMBH 发明人 VON DER WAYDBRINK HUBERTUS;SCHEIBE SIEGFRIED;MEYER JENS;WOLF ANDREJ;TRAEBER UWE;HENTSCHEL MICHAEL
分类号 C23C16/54 主分类号 C23C16/54
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