| 摘要 |
<p>A track carriage system is provided to reduce the contamination by the particle accumulated on the floor by blocking the wind using the cover. A clad board(14) is adhered using a groove(9) which is formed at the bottom of a race rail(8) of the track carriage system in the clean room. The clad board is extended to the bottom outside of the race rail. A bottom cover(12) equipped with a plurality of perforations(24) is adhered to the clad board. A plurality of base plates(6) which are arranged on a floor side(26) and support the race rail of the track carriage system. The cover covering the floor side is adhered to the bottom of rail.</p> |
