| 摘要 |
PROBLEM TO BE SOLVED: To provide a titanium nitride-stripping liquid for stripping a titanium nitride coating film, the titanium nitride-stripping liquid being capable of stripping a titanium nitride coating film without affecting an insulating layer. SOLUTION: The titanium nitride-stripping liquid includes hydrofluoric acid, hydrogen peroxide and a water-soluble organic solvent, and the water-soluble organic solvent includes a polyhydric alcohol or an alkyl ether. According to the present invention, since the titanium nitride-stripping liquid includes glycol ether, corrosion to the insulating layer by the titanium nitride-stripping liquid is prevented when stripping the titanium nitride coating film. COPYRIGHT: (C)2009,JPO&INPIT |
