摘要 |
An apparatus is provided for compaction of silicon powder in a reactor to minimise oxidation of the silicon, which compaction is in part effected by using the drop in pressure across a filter (2) for exit gases from the reactor, the silicon powder being passed along a duct (10) towards an exit (1) of a reactor. The compaction is in addition carried out mechanically with the aid of a piston (3) arranged at a gas exit (1), the filter (2) advantageously being arranged on the piston (3), the filter (2) being permeable to th gases, but collecting the powder. 10 A method is also provided for compaction of silicon powder using an apparatus as described above. |