| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive substrate conveying device which requires neither synchronous adjustment nor complex control. SOLUTION: The substrate conveying device includes: a substrate placing platform for placing a substrate to be processed; a slide mechanism for slidably supporting the substrate placing platform to a body frame; an elevating mechanism for supporting and elevating the substrate placed on the substrate placing platform; and a transferring device for accurately transferring the substrate placing platform slidably supported by the slide mechanism to the set position. The elevating mechanism has an interlock mechanism which lifts up the substrate if the substrate placing platform is slid to one direction by the transferring mechanism, and lifts down the substrate if the substrate placing platform is slid to the other direction. COPYRIGHT: (C)2009,JPO&INPIT
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