| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical inspection device, a pinhole inspection device, a film thickness inspection device, and a surface inspection device capable of reducing abnormality determination of a following normal inspecting object when the incident light quantity to a PMT temporarily becomes excessive due to a remarkable defect or the like of the inspecting object. SOLUTION: The optical inspection device irradiates the inspecting object with light, and detects, with a PMT3, detecting object light P2 having passed through, transmitted through, and reflected by the inspecting object, thereby inspecting the inspecting object. The optical inspection device comprises an I/V converting circuit 11 for converting output current I from the PMT3 into a voltage signal V1, a low pass filter circuit 13 for extracting low frequency component lower than a predetermined frequency from the voltage signal V1, and an arithmetic apparatus 14 for outputting the difference between a signal having passed through the low pass filter circuit 13 and a signal that has not passed through the low pass filter circuit 13. COPYRIGHT: (C)2009,JPO&INPIT
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