发明名称 DEPTH MEASUREMENT OF NARROW HOLES
摘要 A method for measuring a depth of a narrow hole, the method includes: obtaining from a chromatic confocal sensor a group of height measurements taken along an imaginary line that crosses the narrow hole; ignoring height measurements attributed to optical artifacts and blind measurement points and calculating an inverted parabolic estimate of a sub-group of the height measurements; wherein a top of the parabolic estimate is representative of a height of a bottom of the narrow hole.
申请公布号 WO2009024970(A2) 申请公布日期 2009.02.26
申请号 WO2008IL01136 申请日期 2008.08.18
申请人 CAMTEK LTD.;GRIMBERG, ILANA;BLOOMHILL, MICHAEL;KOREN, SHIMON 发明人 GRIMBERG, ILANA;BLOOMHILL, MICHAEL;KOREN, SHIMON
分类号 G06F19/00 主分类号 G06F19/00
代理机构 代理人
主权项
地址