| 摘要 |
<p>An apparatus for transferring substrate including first lift and second lift is provided to shorten transferring time, processing time, and latency time of a substrate by transferring a plurality of substrates with a first lift and a second lift by turns. A first top rotary supporting bar(131), a second top rotary supporting bar(231), a first bottom rotary supporting bar(132), and a second bottom rotary supporting bar(232) are rotated in separated state. A first lift(100) and a second lift(200) are lifted between a first position and a second position by turns. A plurality of substrates(400) is transferred by the first lift and the second lift. Latency time of the substrate in the first rotary supporting bar and the second rotary supporting bar is shortened. The first top rotary supporting bar, the second top rotary supporting bar, the first bottom rotary supporting bar, and the second bottom rotary supporting bar are rotated by a first to a fourth rotary axis and a first to a fourth belt member.</p> |
