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发明名称
摘要
申请公布号	JP4231248(B2)	申请公布日期	2009.02.25
申请号	JP20020188190	申请日期	2002.06.27
申请人		发明人
分类号	H01L21/471;H01L29/786;H01L21/312;H01L21/316;H01L21/336;H01L21/473;H01L51/00;H01L51/05	主分类号	H01L21/471
代理机构		代理人
主权项
地址

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