| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that much labor and time are required in the setting of an inspection recipe such as an image acquiring parameter, an inspection parameter and the like at the time of inspection in a flaw inspection device to cause the lowering of the rate of operation of the flaw inspection device. SOLUTION: A condition most suitable for detection is automatically sorted from a plurality of conditions by setting a plurality of image acquiring conditions or the like to perform inspection at every set condition and classifying all of detected flaws into a real flaw and a false report using an automatic flaw classifying function. Further, if an overlap-free flaw OR file is formed from a plurality of inspection results, efficiency is further enhanced. Furthermore, a condition capable of detecting many specific flaws using the automatic flaw classifying function can be also selected. COPYRIGHT: (C)2005,JPO&NCIPI |
