| 摘要 |
A substrate polishing article is provided to shorten the by consecutively and horizontally transferring the new substrate with a conveyor belt. A substrate polishing article comprises the transfer means(10,11,12,13) moving the substrate(S); the polishing part including the grinding wheel and the spindle; and the support tables (20a,20b) which while substrate is moved and the edge surface is ground, regularly maintain the height of the edge surface. The transfer means is conveyor in the state where the conveyor vacuum-sucking the substrate which is moved. The support table includes the blower spraying the air to substrate and the absorbing body inhaling the air from the substrate furnace. |
