| 发明名称 |
Apparatus for blanking a charged particle beam |
| 摘要 |
A beam blanking unit (1) comprises first and second blanking plates (2, 3) mounted to a support plate (15). A stopper (4) is mechanically and electrically connected to the first blanking plate (2). |
| 申请公布号 |
GB2414857(B) |
申请公布日期 |
2009.02.25 |
| 申请号 |
GB20040012428 |
申请日期 |
2004.06.03 |
| 申请人 |
NANOBEAM LIMITED |
发明人 |
TAO ZHANG |
| 分类号 |
H01J37/04;G03F7/00;G21K1/087;H01J9/14;H01J37/09;H01J37/147;H01J37/15 |
主分类号 |
H01J37/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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