CONDUCTIVE LAMINATE AND MANUFACTURING METHOD THEREOF

摘要

A conductive laminate and a manufacturing method thereof are provided to secure uniformity of electric property of a thin film of zinc oxide by including an intermediate layer which consists of metal oxide between a substrate and a transparent conductive film. A conductive laminate includes an interlayer and a thin film. The thin film of zinc oxide is doped with an element M. The interlayer is formed between a substrate and the thin film of the zinc oxide. The interlayer includes oxide having M'2O3. The element M and M' of the oxide having the M'2O3 separately supply the conductive laminate which is selected from transition elements groups having an oxidation number of +3.