发明名称 OPTICAL ELEMENT AND OPTICAL DEVICE
摘要 An optical element (40) includes a substrate (10), a magnetostrictive film (11) which is arranged on the substrate, a film thickness of the magnetostrictive film varying in accordance with intensity of a magnetic field, and a reflection film (15) which is arranged on the magnetostrictive film (11) and reflects light. An optical apparatus includes a stage (41) including a holder (141) for carrying the optical element (40), provided with a plurality of holes arranged in a carrying surface thereof for carrying the optical element, a plurality of magnetic field generation parts (61) embedded in the plurality of holes of the holder (141), and a control mechanism (150) for controlling the magnetic field generated by each of the plurality of magnetic field generation parts (61), and controlling the film thickness of the magnetostrictive film (11) of the optical element (40).
申请公布号 EP2028522(A1) 申请公布日期 2009.02.25
申请号 EP20070742085 申请日期 2007.04.20
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 TAWARAYAMA, KAZUO;HIGASHIKI, TATSUHIKO;HIGASHIKAWA, IWAO
分类号 G02B26/06;G02B5/08;G02B26/08;G21K1/06;H01L21/027 主分类号 G02B26/06
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