| 摘要 |
A device for regenerating etching liquid and a regenerating method thereof are provided to reduce down-time of the etching device maximumly by circulating the regenerated etching liquid. A device for regenerating etching liquid includes the followings. A temperature control unit(11) controls temperature of the extracted spent etching liquid. A atomization unit(12) atomizes the controlled etching liquid. The eduction unit(13) educes silicide in the spent etching liquid. And a separation unit(14) gains regenerated etching liquid by separating the educed silicide.
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