发明名称 |
CVD APPARATUS AND METHOD FOR CLEANING CVD APPARATUS |
摘要 |
<p>There is provided a CVD apparatus capable of efficiently removing a by-product such as SiO 2 or Si 3 N 4 which is stuck and deposited onto the surface of an internal wall, an electrode or the like in a CVD chamber in a film forming process, and furthermore, executing cleaning having a small damage over an upper electrode and a counter electrode stage (a lower electrode) and manufacturing a thin filmof high quality, and a CVD apparatus cleaning method using the same. In a CVD apparatus cleaning method of introducing a cleaning gas to carry out plasma cleaning over an inside of a CVD chamber after forming a deposited film on a surface of a substrate, a frequency of an RF to be applied to an RF electrode is switched into a first frequency to be applied for forming a film and a second frequency to be applied when executing the plasma cleaning.</p> |
申请公布号 |
EP1612857(A4) |
申请公布日期 |
2009.02.25 |
申请号 |
EP20040720167 |
申请日期 |
2004.03.12 |
申请人 |
RESEARCH INSTITUTE OF INNOVATIVE TECHNOLOGY FOR THE EARTH |
发明人 |
WANI, E.;SAKAI, K.;OKURA, S.;SAKAMURA, M.;ABE, K.;MURATA, H.;KAMEDA, K. |
分类号 |
H01L21/31;H05H1/46;C23C16/44;H01J37/32;H01L21/3065 |
主分类号 |
H01L21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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