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经营范围
发明名称
RECONFIGUREABLE INTERFEROMETER SYSTEM
摘要
申请公布号
EP1682851(A4)
申请公布日期
2009.02.25
申请号
EP20040795480
申请日期
2004.10.19
申请人
ZYGO CORPORATION
发明人
KUCHEL, MICHAEL
分类号
G01B9/02;G01B11/24;G01J9/02;G01M11/02
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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