Cooling system, exposure apparatus having the same, and device manufacturing method

摘要

Disclosed is a cooling system for cooling an optical member including a material having a linear expansion coefficient that becomes equal to zero at a predetermined temperature, the cooling system including a temperature detecting unit for detecting a temperature of a detection-subject portion of the optical member, a cooling unit for cooling a cooling-subject portion of the optical member, an intensity detecting unit for detecting an intensity of light incident on the optical member and a control unit for controlling the cooling unit on the basis of the detection by the temperature detecting unit and by the intensity detecting unit.