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发明名称
Plasma processor for large workpieces
摘要
申请公布号
EP0929093(B1)
申请公布日期
2009.02.25
申请号
EP19990200728
申请日期
1995.12.05
申请人
LAM RESEARCH CORPORATION
发明人
BARNES, MICHAEL;HOLLAND, JOHN;VELTROP, ROBERT;BENJAMIN, NEIL;BEER, RICHARD
分类号
H01J37/32;H05H1/46;C23C16/507;H01L21/205;H01L21/302;H01L21/3065
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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