发明名称 Method of manufacturing a chip
摘要 Provided are a chip, a chip stack, and a method of manufacturing the same. A plurality of chips which each include: at least one pad formed on a wafer; and a metal layer which protrudes up to a predetermined thickness from the bottom of the wafer and is formed in a via hole exposing the bottom of the pad are stacked such that the pad and the metal layer of adjacent chips are bonded. This leads to a simplified manufacturing process, high chip performance and a small footprint for a chip stack.
申请公布号 US7494909(B2) 申请公布日期 2009.02.24
申请号 US20060499116 申请日期 2006.08.03
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 JU CHULL WON;MIN BYOUNG GUE;KIM SEONG IL;LEE JONG MIN;LEE KYUNG HO;KANG YOUNG IL
分类号 H01L21/00;H01L21/44;H01L21/46;H01L21/76;H01L23/02;H01L29/40 主分类号 H01L21/00
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