发明名称 Buffer layers for device isolation of devices grown on silicon
摘要 Various embodiments proved a buffer layer that is grown over a silicon substrate that provides desirable isolation for devices formed relative to III-V material device layers, such as InSb-based devices, as well as bulk thin film grown on a silicon substrate. In addition, the buffer layer can mitigate parallel conduction issues between transistor devices and the silicon substrate. In addition, the buffer layer addresses and mitigates lattice mismatches between the film relative to which the transistor is formed and the silicon substrate.
申请公布号 US7494911(B2) 申请公布日期 2009.02.24
申请号 US20060527785 申请日期 2006.09.27
申请人 INTEL CORPORATION 发明人 HUDAIT MANTU K.;SHAHEEN MOHAMAD A.;CHOW LOREN A.;TOLCHINSKY PETER G.;FASTENAU JOEL M.;LOUBYCHEV DMITRI;LIU AMY W. K.
分类号 H01L21/28;H01L21/00;H01L21/20 主分类号 H01L21/28
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