发明名称 Semiconductor device and manufacturing method thereof
摘要 A semiconductor device includes a semiconductor layer formed by epitaxial growth in a first region which is obtained by etching a semiconductor substrate to a predetermined depth, a surface of the semiconductor layer having a same height from the bottom of the semiconductor substrate as a height of a surface of the semiconductor substrate, a buried insulating layer buried between the semiconductor substrate and the semiconductor layer and an element isolation region separating each element region in the semiconductor layer and isolating the semiconductor layer from the semiconductor substrate in plan.
申请公布号 US7495287(B2) 申请公布日期 2009.02.24
申请号 US20070649170 申请日期 2007.01.03
申请人 SEIKO EPSON CORPORATION 发明人 OKA HIDEAKI;KANEMOTO KEI
分类号 H01L27/01 主分类号 H01L27/01
代理机构 代理人
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