Microelectromechanical device array and method for driving the same

摘要

In a microelectromechanical device array including an array of devices arranged at least one of one-dimensionally and two-dimensionally each of which includes a movable portion that is supported to be elastically deformed and that has a movable electrode on at least one part thereof and fixed electrodes that are disposed to face the movable portion and by which the movable portion is moved to one of at least two different positions, hold electrodes are disposed beside the fixed electrodes, and a hold voltage is applied to the hold electrodes and before rewriting an address voltage that is applied to the fixed electrodes so as to fix the position state of the movable portion.