发明名称 Optical microcantilever
摘要 An optical microcantilever for a scanning near field microscope comprises a support section, a cantilever-shaped optical waveguide, and a light blocking wall. The optical waveguide has a free end, a fixed end fixed to the support section and terminating in a light input/output end, and a tip formed at a side of the free end of the cantilever and having a microscopic aperture at an end thereof. The light blocking wall blocks the transmission of light scattered from a region of the light input/output end in the direction of the tip of the optical waveguide.
申请公布号 US7496250(B2) 申请公布日期 2009.02.24
申请号 US20070799974 申请日期 2007.05.03
申请人 SEIKO INSTRUMENTS INC. 发明人 NIWA TAKASHI;KATO KENJI;ICHIHARA SUSUMU;CHIBA NORIO;MITSUOKA YASUYUKI;OUMI MANABU;KASAMA NOBUYUKI
分类号 G01B11/30;G02B6/12;G01B5/28;G01B11/00;G01B21/30;G01Q30/02;G01Q60/06;G01Q60/22;G01Q60/32;G01Q60/38;G01Q70/02 主分类号 G01B11/30
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