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发明名称
HALOGENATED ANTI-REFLECTIVE COATINGS
摘要
申请公布号
KR100885094(B1)
申请公布日期
2009.02.20
申请号
KR20047012331
申请日期
2002.02.11
申请人
发明人
分类号
G03F7/027;G03F7/11;C08F220/22;C08F220/28;C09D133/16;G03F7/038;G03F7/09;G03F7/40;H01L21/027;(IPC1-7):G03F7/027
主分类号
G03F7/027
代理机构
代理人
主权项
地址
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