NOZZLE STORING APPARATUS AND COATING APPARATUS

摘要

A nozzle storing apparatus and a coating apparatus are provided, which keep a nozzle by efficiently using the liquid for keeping efficiently. A nozzle storing apparatus comprises: protrusion members(31-33) in which an upper side for installing a supply opening is placed at the location facing the outlet of a nozzle; feeding pipes(34-36) communicating from a supply source providing the washing solution to the supply opening; a retention unit which is connected to the feeding pipe and retains the washing solution higher than the upper side of the protrusion member; and a cleaning liquid supply member supplying the washing solution from the supply source.