| 摘要 |
<p>PURPOSE: A rubbing apparatus is provided to extend the expected life span of a rubbing fabric and increase the productivity by preventing damage on the rubbing fabric. CONSTITUTION: A buffer pad(109) and a substrate(105) on which an alignment film is applied are placed on a table(107). The table is installed to support the substrate and move the substrate in a horizontal direction. The buffer pad is arranged in front of an edge of the substrate in a proceeding direction of the table to reduce a step height of the edge of the substrate. A rubbing roll(101) is rotated by a driving unit at high speed and the table lets a rubbing fabric(103) rub with the alignment film while proceeding in a rubbing roll direction.</p> |
