| 摘要 |
<p>Semiconductor manufacturing equipment includes containers (Xb, Ab, Bb, Cb) for storing a liquid material. The semiconductor manufacturing equipment is provided with a liquid material supplying part for supplying the liquid material from the containers; a liquid vaporizing part for vaporizing the liquid material supplied from the liquid material supplying part and generating a gas; a processing part for performing film forming process by using the gas supplied from the liquid vaporizing part; an exhaust part for exhausting the processing part; and liquid level detectors (Xs, As, Bs, Cs) arranged at a bottom part of the container for detecting the liquid level of the liquid material by an acoustic wave.</p> |
