| 摘要 |
PROBLEM TO BE SOLVED: To provide a vapor dryer which not only forms vapor instantaneously with supplying the vapor on a substrate for drying, but also performs clean cleaning and clean drying without causing any corrosion. SOLUTION: A vapor dryer comprises a cleaning device which supports a substrate W, a process liquid feeding unit 31 which selectively supplies two or more kinds of process liquid, a quartz glass tube 14 having one end connected to the process liquid feeding unit 31 and the other end having a vapor supply pipe 26 connected to the cleaning device and having a channel to circulate the process liquid supplied from the process liquid feeding unit 31, a rod heater 27 installed inside the quartz glass tube 14 separately from the channel, and a halogen lamp 28 installed outside the quartz glass tube 14 to heat the rod heater 27, serving as a heating means to heat or vaporize the process liquid circulating in the channel by radiant heat and supplying it to the vapor supply pipe 26. COPYRIGHT: (C)2009,JPO&INPIT
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