| 摘要 |
PROBLEM TO BE SOLVED: To enable inhibiting of the deterioration of drawing quality, on exchanging a used functional fluid with a new one caused by the exchange of a functional fluid tank. SOLUTION: This functional fluid feeding device comprises the following components: (1) A tank unit 122 which continuously supplies the functional fluid to a plurality of head units, following the exchange of a used main tank 181 with a new one, and (2) a functional fluid supply flow path 145 which consists of a main flow path 131 connected with the tank unit 122 on its upstream side and a plurality of individual flow paths 143 which branch off the main flow path 131 and are connected with a plurality of the head units on its downstream side. In addition, the individual flow paths 143 each have a capacity prorated according to the individual functional fluid consumption of each head unit relative to the total capacity of the plurality of the individual flow paths 143. COPYRIGHT: (C)2009,JPO&INPIT
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