| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly accurate astigmatism correction adjusting method capable of obtaining stable image quality without depending on a pattern or a sample used for astigmatism adjustment and without relying on skill of a worker, in a charged particle beam device. SOLUTION: A digital image is obtained by simultaneously changing the amounts of excitation in the X direction and Y direction of the astigmatism correcting coil of the charged particle beam device, a numerical normalization process is applied to the image, image quality of the image is numerically expressed, error components by influence of noise and vibration is removed from the numerical value by approximate processing, and an astigmatism correction amount having a small quantity of astigmatism is thereby estimated. COPYRIGHT: (C)2009,JPO&INPIT
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