FILM PATTERN, METHOD OF FORMING FILM PATTERN, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE, ELECTRON-EMITTING ELEMENT, ELECTRON SOURCE AND PICTURE DISPLAY UNIT USING THE FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To inhibit the generation of a variation in the adhesiveness of an obtained film pattern, and to improve the adhesiveness of the obtained film pattern.

SOLUTION: The film pattern formed on a substrate is composed of a metal or a metal oxide having resistance and a metal oxide inhibiting resistance, wherein the film of the metal or the metal oxide having the resistance and the film of the metal oxide inhibiting the resistance are different from each other and a boundary surface between the films has a concentration gradient with respect to each film.

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