BURNING CHAMBER, AND SEALING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a technique for burning sealing material in a vacuum atmosphere. SOLUTION: A first and a second panels are disposed in a vacuum tank 31 with a ring of sealing material (a subject item to be sealed 60) held between them. The subject item to be sealed 60 is heated while the inside of the vacuum tank 31 is evacuated by an evacuation system 50 for burning the sealing material, where oxygen gas and diluent gas are introduced into the vacuum tank 31 from a gas introducing system 40. During the burning, total pressure inside the vacuum tank 31 is measured by a pressure measuring device 39. Oxygen gas pressure is determined by a control device based on above result and measurements of gas flow meters 45 and 55. Oxygen gas flow and diluent gas flow are controlled by gas flow controllers 42 and 52 in such a way as not to be lower than the lower limit pressure while keeping the inside of the vacuum tank 31 at lower pressure than 1 barometric pressure. Organic binder in the sealing material is burnt by oxygen, and the sealing material is discharged as carbon dioxide or water. COPYRIGHT: (C)2009,JPO&INPIT