| 摘要 |
Disclosed is a supply device comprising two columnar containers (1, 1') and a communicating tube (5) for connecting the insides of the containers (1, 1') with each other at the lower ends. The containers (1, 1') are filled with an organic metal compound which is in a solid state at room temperature. The upper portion of the container (1) is provided with a gas feed tube (2) for introducing a carrier gas into the container (1). The upper portion of the container (1') is provided with a gas discharge tube (3) for discharging the carrier gas containing the organic metal compound.
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