| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a treatment apparatus of PFC gas with excellent thermal efficiency and efficiently decomposing PFC-containing gas even at low temperature, and a treatment method using the treatment apparatus of PFC gas, and efficiently treating while extending a service life of a PFC decomposition agent. <P>SOLUTION: The treatment apparatus comprises an apparatus body 10 having rod-like inner heaters 11 and cylindrically disposed outer heaters 12 with given spaces from the inner heaters 11. A treating agent disposing part 13 for filling the PFC decomposition agent is formed between the inner heaters 11 and outer heaters 12. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
