| 摘要 |
PROBLEM TO BE SOLVED: To reduce partial pressure of an oxidizing gas inside when FOUP is closed while it is being fixed to the FIMS system and is in the opening state. SOLUTION: A curtain nozzle, which can form a gas curtain, is arranged above the upper side of an opening 10, in addition to a purge gas feed nozzle which is provided outside both sides of the opening 10 within the FIMS. When a pod 2 is closed by a cover 4, a door opening/closing mechanism is used to incline the cover 4 by a predetermined angle to the flowing direction of the curtain gas and its state is kept for a predetermined time, and the purge gas fed to the gas curtain by a cover 4 is also used for purging within a pod. COPYRIGHT: (C)2009,JPO&INPIT
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