Nanopatterning of disk media with flash sacrificial layer in block copolymer lithography

摘要

A method for fabricating a patterned disk of a hard disk drive. The method includes forming a layer of magnetic material over a substrate and then forming a sacrificial flash layer over the layer of magnetic material. A co-polymer material is formed over the sacrificial flash layer and then a plurality of magnetic dots separated by a non-magnetic material are formed in the magnetic layer. The flash layer is preferably a FePt material with a non-magnetic Ag or Cu based alloy. Such material not only provides good adhesion between the co-polymer and magnetic layers but also diffuses into the grains of the magnetic material. The diffusion of the non-magnetic flash layer between the grains of the magnetic material reduces magnetic cross-talk and improves the signal to noise ratio of the disk.