MANUFACTURING METHOD OF ORGANIC EL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic EL device capable of suppressing damages to the organic EL element when forming a film including an inorganic substance layer to seal the organic EL element.

SOLUTION: When an organic EL element 20 which is constructed by interposing an organic EL layer 22 including an luminous layer between a pair of electrodes of which at least one is transparent or semi-transparent and a sealing layer 30 which includes at least one layer of inorganic substance film to contact the organic EL element 20 and seals the organic EL element 20 are formed on a substrate 10, a first sealing film 31 contacting the organic EL element 20 in the sealing layer 30 is formed by an opposed target type sputtering method and the other inorganic substance film in the sealing layer 30 is formed by the other film-forming method other than the opposed target type sputtering method.

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