| 摘要 |
PROBLEM TO BE SOLVED: To provide a condenser microphone having a simplified manufacturing process, an improved diaphragm vibration characteristic, a reduced parasitic capacitance, and an improved sensitivity. SOLUTION: The condenser microphone comprises an electrically-conductive diaphragm having a center portion and a plurality of arms radially-extending outwards and vibrating when receiving sound waves; an electrically-conductive plate disposed opposite to the diaphragm; a substrate disposed opposite to the plate and having a cavity; a first support insulating the diaphragm from the substrate with a clearance between them and supporting the front ends of the arms on the substrate; and a second support disposed between the adjoining arms, insulating the plate from the substrate with a clearance between them and supporting the outer edge of the plate on the substrate, wherein the distance between the center of the plate and the second support is shorter than the distance between the center of the center portion of the diaphragm and the first support. COPYRIGHT: (C)2009,JPO&INPIT
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