发明名称 |
MASK DEFECT INSPECTION DATA GENERATING METHOD, MASK DEFECT INSPECTION METHOD AND MASK PRODUCTION METHOD |
摘要 |
According to a mask defect inspection data generating method, a distance between inspection areas neighboring in a predetermined direction is calculated based on inspection area control information defined in photomask inspection data. It is determined whether or not the calculated distance between inspection areas is less than a predetermined distance. When it is determined that the distance between inspection areas is less than a predetermined distance, the inspection area is combined to produce an optimization inspection area. The produced optimization inspection area information is defined in inspection layout data for making a reference in die-to-database defect inspection.
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申请公布号 |
US2009046280(A1) |
申请公布日期 |
2009.02.19 |
申请号 |
US20080187868 |
申请日期 |
2008.08.07 |
申请人 |
TSUTSUI TOMOHIRO;YOSHIKAWA RYOJI;IKENAGA OSAMU |
发明人 |
TSUTSUI TOMOHIRO;YOSHIKAWA RYOJI;IKENAGA OSAMU |
分类号 |
G01N21/88;G01N21/956;G03F1/84;H01L21/027 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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