| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature measuring member, temperature measuring device, and temperature measuring method dispensing with external wiring, generating no impurities or no dust, and capable of measuring the highest arrival temperature in a wide temperature range from a low temperature to a high temperature. SOLUTION: A projection shape generated on a metal thin film by a heat history received from a temperature-measuring object by the temperature measuring member 1 having the metal thin film formed thereon is observed by an optical microscope 3, and the results are output to an image data operation processing device 6 through a CCD camera 4 and an IO board 5, and a surface density is calculated by a number calculation part 7 based on image data, and the highest arrival temperature of the temperature-measuring object is determined from the surface density calculated by a temperature calculation part 9 and data on the highest arrival temperature and the surface density stored beforehand in a memory 8. COPYRIGHT: (C)2009,JPO&INPIT
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