| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card having high reliability by removing contact failure between a probe and a pad, and between the probe and a circuit board even at a high temperature, for example, in a burn-in test, while coping with pitch-narrowing and multi-chipping tendencies. SOLUTION: This electric signal connection device is constituted as follows: each probe unit held by a plurality of support rods is arranged and fixed in each opening of a grid-like support with a plurality of resin film-shaped probes in the laminated or arranged state in parallel; a plurality of projecting fixtures are provided on the connection side to the circuit board of the grid-like support, and fitted into each corresponding hole on the circuit board, to thereby fix the grid-like support to the circuit board; and a difference at a fitting time between the outer diameter of an insertion part of each fixture and the inner diameter of each hole on the circuit board is set to be zero or fine on the periphery of the center of the grid-like support, and the difference on a position other than the periphery of the center is set to be larger than that on the periphery of the center. COPYRIGHT: (C)2009,JPO&INPIT
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