发明名称 NANO SILICON DIOXIDE ABRADANT POLISHING LIQUID FOR PROCESSING MICROCRYSTAL GLASS
摘要 The present invention provides a nano silicon dioxide abradant polishing liquid for processing microcrystal glass, which contains abradant I, abradant II, surfactant, pH regulator and deionized water; and the weight percentages of the components are following: 10wt%-40wt% of abradant I, 5wt%-20wt% of abradant II, 1wt%-6wt% of pH regulator, 0.01wt%-0.6wt% of surfactant and the balance of deionized water; the pH of the mixed solution of the aforementioned each component is 10-11; in which the abradant I is silicon dioxide colloidal solution having a particle size of 0.1-200nm, the concentration of the above solution is 10% to 40%; the abradant II is silicon dioxide powder having a particle size of 0.1-200nm.
申请公布号 WO2009021363(A1) 申请公布日期 2009.02.19
申请号 WO2007CN02753 申请日期 2007.09.18
申请人 JIANGSU HAIXUN INDUSTRY & COMMERCE GROUP CO., LTD;ZHONG, JIHE 发明人 ZHONG, JIHE
分类号 C09G1/02;C09K3/14;H01L21/304 主分类号 C09G1/02
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