SCRIBING HEAD, SCRIBING DEVICE, AND SCRIBING METHOD

摘要

A scribing head using a servomotor to cause a cutter mechanism to be in pressure contact with a glass substrate, wherein a scribing load is reduced. The cutter mechanism (26) for scribing a surface of the glass substrate placed in a horizontal position is provided at the lower end of a vertically slidable slide block (25). The slide block (25) is vertically slid by a ball screw (23) rotated by the servomotor (21). When the slide block (25) is slid vertically, a balance block (27) placed above the slide block (25) is slid in the direction opposite the direction in which the slide block (25) is slid. As a result, a scribing load applied to the glass substrate (70) by the cutter mechanism (26) is reduced to a level lower than a load applied to the slide block (25).