HYBRID INTEGRATED MEMS RECONFIGURABLE ANTENNA ARRAY (HIMRA)

摘要

A phased array antenna is disclosed that uses hybrid integration of the wave coupled MEMS phase shifters and a substrate integrated slotted waveguide antenna array and associated feed network. The antenna includes a substrate integrated waveguide (SIW) slot array; an adapter inner layer having an upper surface facing the SIW array, the adapter inner layer having a plurality of cavities formed therethrough; a plurality of MEMS chips positioned within the cavities; and a SIW feed network facing a lower surface of the SIW slot array. The adapter inner layer may include upper and lower low-frequency substrate layers stacked with an intervening bonding film. One of the low-frequency substrate layers may further include bias lines etched on a surface thereof.