发明名称 Field-guided planar precision drive for use with air-mounted rotor bearing permanent magnet circuit, has stator plate beneath rotor, and pairs of drive coils lying oppositely are provided on stator plate
摘要 #CMT# #/CMT# The field-guided planar precision drive has a stator plate beneath the rotor, and pairs of drive coils (3) lying oppositely are provided on the stator plate. The stator plate has a linear guidance (5) for each pair of drive coils, in order to move the pairs of drive coils along the x or y axis of the coordinate system. The adjustment of a rotor (1) in x and y direction generates force component to the opposite pairs of drive coils. #CMT#USE : #/CMT# Field-guided planar precision drive for use with an air-mounted rotor bearing permanent magnet circuit. #CMT#ADVANTAGE : #/CMT# The stator plate has a linear guidance for each pair of drive coils, in order to move the pairs of drive coils along the x or y axis of the coordinate system and the adjustment of a rotor in x and y direction generates force component to the opposite pairs of drive coils, and thus a cost effective manufacturing of coil for precision drive ensures improved dynamic total weight of precision drive. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a perspective view of a field-guided planar precision drive. 1 : Rotor 2 : Air bearing 3 : Pairs of drive coils 5 : Linear guidance 6 : Stator.
申请公布号 DE102007037886(A1) 申请公布日期 2009.02.19
申请号 DE20071037886 申请日期 2007.08.10
申请人 INSTITUT FUER MIKROELEKTRONIK- UND MECHATRONIK-SYSTEME GGMBH 发明人 SCHAEFFEL, CHRISTOPH;ZEIKE, NORBERT;SPILLER, FRANK;MOHR, HANS-ULRICH;HESSE, STEFFEN;BORNMANN, VOLKER
分类号 H02K41/035 主分类号 H02K41/035
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